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Roots pump that works without backing pump!

25.08.14

Multi stage roots pump from Pfeiffer Vacuum generates clean and dry vacuum for different applications and markets. Smaller ACP-roots pumps are often used as backing pumps for turbo pumps, bigger A120 is used in lyophilisation process and series A100, A3P and A3H are used in bigger quantities in semiconductor or solar industry.

 

 

 

 


Advantages:

  • Pumps from atmosphere
  • Dry pump, without particles
  • Replacement for oil or scroll pump
  • Frequency transformer to adjust the pump to your application
  • Long service interval (20.000h/22.000h for ACP 15/ACP 28 and ACP 40)
  • Possibility to pump water vapor up to 1000g/h

 

Applications:

  • Load-lock
  • Transport chambers
  • Sputtering
  • PVD
  • Metrology
  • Semiconductor and solar industry; doping, deposition, etching, termal processes (RTP), Chemical coating

 

Simulation

Oglasi:

JEOL
Pfeiffer vacuum
Oxford Instruments
RMC Products
CryopAL
SPI supplies
VAT AG
HSR AG