News archive
- 28.10.15Training in the field of vacuum technology
- 02.10.15Vacuum solutions
- 16.06.15Liquid nitrogen manipulation
- 07.04.15125 years of company Pfeiffer Vacuum
- 28.02.1525 years of company Scan
- 19.01.15Links to Pfeiffer Vacuum websites
- 18.09.14Vacuum in food industry
- 18.09.14Vacuum systems
- 25.08.14Roots pump that works without backing pump!
- 11.07.14Vacuum chambers
- 17.04.14Awarded industry catalog
- 11.04.14JSM 6010LA InTouch scope
Roots pump that works without backing pump!
25.08.14
Multi stage roots pump from Pfeiffer Vacuum generates clean and dry vacuum for different applications and markets. Smaller ACP-roots pumps are often used as backing pumps for turbo pumps, bigger A120 is used in lyophilisation process and series A100, A3P and A3H are used in bigger quantities in semiconductor or solar industry.
Advantages:
- Pumps from atmosphere
- Dry pump, without particles
- Replacement for oil or scroll pump
- Frequency transformer to adjust the pump to your application
- Long service interval (20.000h/22.000h for ACP 15/ACP 28 and ACP 40)
- Possibility to pump water vapor up to 1000g/h
Applications:
- Load-lock
- Transport chambers
- Sputtering
- PVD
- Metrology
- Semiconductor and solar industry; doping, deposition, etching, termal processes (RTP), Chemical coating
